ASTM-F673 › Complete Document History
Standard Test Methods for Measuring Resistivity of Semiconductor Slices or Sheet Resistance of Semiconductor Films with a Noncontact Eddy-Current Gage (Withdrawn 2003)


Obsolete Revision Information:
   2002 EDITION - Measuring Resistivity of Semiconductor Slices or Sheet Resis - Dec. 10, 2002
   1990 R96(E1) EDITION - KEYWORDS ADDED 1996/REAFFIRMED - Jan. 1, 1996
   1990(E2) EDITION - EDITORIALLY CORRECTED - Nov. 1, 1991
   1990(E1) EDITION - EDITORIALLY CORRECTED - June 1, 1990
   1990 EDITION - Measuring Resistivity of Semiconductor Slices or Sheet Resis - April 27, 1990
   1987 EDITION - Measuring Resistivity of Semiconductor Slices or Sheet Resis - Aug. 28, 1987