ASTM-F928 › Complete Document History
Standard Test Methods for Edge Contour of Circular Semiconductor Wafers and Rigid Disk Substrates (Withdrawn 2003)


Obsolete Revision Information:
   2002 EDITION - EDGE CONTOUR OF CIRCULAR SEMIC - Jan. 10, 2002
   1993 EDITION - EDGE CONTOUR OF CIRCULAR SEMIC - Aug. 15, 1993
   1993 R99 EDITION - REAPPROVED IN 1999 - Aug. 15, 1993
   1992 EDITION - EDGE CONTOUR OF CIRCULAR SEMIC - May 15, 1992
   1988 EDITION - EDGE CONTOUR OF CIRCULAR SEMIC - Oct. 31, 1988