BS-ISO-14706 › Historical Revision Information
Surface chemical analysis. Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy
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Surface chemical analysis. Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy
Keywords
Surface chemistry;Reflection;Epitaxial layers;Contamination;Substrates (insulating);X-ray analysis;Fluorimetry;Density;X-ray fluorescence spectrometry;Surface properties;Atoms;Silicon;Surfaces;Surfactants;Chemical analysis and testing;Contaminants
To find similar documents by classification:
71.040.40 (Chemical analysis Including analysis of gases and surface chemical analysis)
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Document Number
BS ISO 14706:2000
Revision Level
2000 EDITION
Status
Superseded
Publication Date
May 15, 2001
Replaced By
BS ISO 14706:2014
Page Count
32
ISBN
0580372529
International Equivalent
ISO 14706:2000
Committee Number
CII/60