BS-ISO-16531 › Historical Revision Information
Surface chemical analysis. Depth profiling. Methods for ion beam alignment and the associated measurement of current or current density for depth profiling in AES and XPS
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Surface chemical analysis. Depth profiling. Methods for ion beam alignment and the associated measurement of current or current density for depth profiling in AES and XPS
Keywords
Surfaces;Surface chemistry;Optical measurement;Chemical composition;Glow discharges;Quantitative analysis;Spectroscopy;Chemical analysis and testing;Thickness;Mass
To find similar documents by classification:
71.040.40 (Chemical analysis Including analysis of gases and surface chemical analysis)
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Document Number
BS ISO 16531:2013
Revision Level
2013 EDITION
Status
Superseded
Publication Date
May 31, 2013
Replaced By
BS ISO 16531:2020
Page Count
30
ISBN
9780580743153
International Equivalent
ISO 16531:2013
Committee Number
CII/60