DIN-EN-62047-12 Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures

DIN-EN-62047-12 - 2012 EDITION - CURRENT



Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures


This document comes with our free Notification Service, good for the life of the document.

This document is available in either Paper or PDF format.

ORDER

Price:

$121.02        




Document Number

DIN-EN-62047-12

Revision Level

2012 EDITION

Status

Current

Publication Date

June 1, 2012