DIN-EN-62047-8 › Semiconductor devices - Micro-electromechanical devices - Part 8: Strip bending test method for tensile property measurement of thin films

DIN-EN-62047-8 - 2011 EDITION - CURRENT



Semiconductor devices - Micro-electromechanical devices - Part 8: Strip bending test method for tensile property measurement of thin films


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Document Number

DIN-EN-62047-8

Revision Level

2011 EDITION

Status

Current

Publication Date

Dec. 1, 2011