EN-62047-1 › Historical Revision Information
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

EN-62047-1 - 2006 EDITION - SUPERSEDED -- See the following: BS-EN-62047-1
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Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions


To find similar documents by classification:

01.040.31 (Electronics (Vocabularies))

31.080.99 (Other semiconductor devices)

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Document Number

EN-62047-1

Revision Level

2006 EDITION

Status

Superseded

Publication Date

Jan. 1, 2006