IEC-62047-34 › Semiconductor devices - Micro-electromechanical devices - Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer

IEC-62047-34 - EDITION 1.0 - CURRENT


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IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.
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Document Number

IEC 62047-34 Ed. 1.0 en:2019

Revision Level

EDITION 1.0

Status

Current

Publication Date

April 1, 2019

Committee Number

47F