IEC-62374 Semiconductor devices - Time dependent dielectric breakdown (TDDB) test for gate dielectric films

IEC-62374 - 1ST EDITION - CURRENT


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Provides a test method of Time Dependent Dielectric Breakdown (TDDB) for gate dielectric films on semiconductor devices and a product lifetime estimation method of TDDB failure
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31.080 (Semiconductor devices Semiconducting materials, see 29.045)

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Document Number

IEC 62374 Ed. 1.0 b:2007

Revision Level

1ST EDITION

Status

Current

Publication Date

March 1, 2007

Committee Number

47