ISO-13084 › Historical Revision Information
Surface Chemical Analysis - Secondary-Ion Mass Spectrometry- Calibration of the Mass
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ISO 13084:2011 specifies a method to optimize the mass calibration accuracy in time-of-flight SIMS instruments used for general analytical purposes. It is only applicable to time-of-flight instruments but is not restricted to any particular instrument design. Guidance is provided for some of the instrumental parameters that can be optimized using this procedure and the types of generic peaks suitable to calibrate the mass scale for optimum mass accuracy.
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71.040.40 (Chemical analysis Including analysis of gases and surface chemical analysis)
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Document Number
ISO 13084:2011
Revision Level
1ST EDITION
Status
Superseded
Publication Date
May 15, 2011
Committee Number
ISO/TC 201/SC 6