ISO-14644-10 Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration

ISO-14644-10 - 1ST EDITION - CURRENT


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ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.

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Notes

Claudia's Notes:
This is a new addition to the ISO 14644 Series.  Additional documents will be released soon -- Parts 12 and 13.

To find similar documents by classification:

13.040.35 (Cleanrooms and associated controlled environments)

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Document Number

ISO 14644-10:2013

Revision Level

1ST EDITION

Status

Current

Publication Date

March 1, 2013

Committee Number

ISO/TC 209