ISO-25138 › Historical Revision Information
Surface Chemical Analysis - Analysis of Metal Oxide Films by Glow-Discharge Optical-Em
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ISO/TS 25138:2010 describes a glow-discharge optical-emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films.
The method is applicable to oxide films 1 nm to 10 000 nm thick on metals. The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn and Al. Other elements that can be determined by the method are O, C, N, H, P and S.
To find similar documents by classification:
71.040.40 (Chemical analysis Including analysis of gases and surface chemical analysis)
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Document Number
ISO/TS 25138:2010
Revision Level
1ST EDITION
Status
Superseded
Publication Date
Dec. 1, 2010
Committee Number
ISO/TC 201/SC 8