ISO/DIS-14644-12 › Cleanrooms and associated controlled environments - Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration

ISO/DIS-14644-12 - 1ST EDITION DRAFT - SUPERSEDED
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Cleanrooms and associated controlled environments - Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration


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Document Number

ISO/DIS 14644-12

Revision Level

1ST EDITION DRAFT

Status

Superseded

Publication Date

Oct. 27, 2016