ISO/DIS-14644-12 › Historical Revision Information
Cleanrooms and associated controlled environments - Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration
Cleanrooms and associated controlled environments - Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration
To find similar documents by classification:
13.040.35 (Cleanrooms and associated controlled environments)
Document Number
ISO/DIS-14644-12
Revision Level
1ST EDITION DRAFT
Status
Cancelled
Publication Date
Dec. 2, 2013