ISO/DIS-14644-12 Historical Revision Information
Cleanrooms and associated controlled environments - Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration

ISO/DIS-14644-12 - 1ST EDITION DRAFT - CANCELLED
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Cleanrooms and associated controlled environments - Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration


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13.040.35 (Cleanrooms and associated controlled environments)

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Document Number

ISO/DIS-14644-12

Revision Level

1ST EDITION DRAFT

Status

Cancelled

Publication Date

Dec. 2, 2013