SEMI-E152 › Mechanical Specification of EUV Pod for 150 mm EUVL Reticles

SEMI-E152 - 2014 EDITION - CURRENT



Mechanical Specification of EUV Pod for 150 mm EUVL Reticles


ORDER



Document Number

SEMI E152-0214

Revision Level

2014 EDITION

Status

Current

Publication Date

Feb. 1, 2014