SS-EN-ISO-14644-10 Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013)

SS-EN-ISO-14644-10 - 2013 EDITION - CURRENT


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ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.

To find similar documents by classification:

13.040.35 (Cleanrooms and associated controlled environments)

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Designation Name

SS-EN ISO 14644-10:2013

Revision Level

2013 EDITION

Status

Current

Publication Date

March 11, 2013

Language(s)

English

Page Count

44

International Equivalent

EN ISO 14644-10:2013(IDT); ISO 14644-10:2013(IDT)