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Scope

1.1 This practice provides the minimum information necessary to describe the instrumental, experimental, and data reduction procedures used in acquiring and reporting secondary ion mass spectrometry (SIMS) mass spectral data.

1.2 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Keywords

mass spectral data; SIMS; ICS Number Code 71.040.50 (Physicochemical methods of analysis)

To find similar documents by ASTM Volume:

03.06 (Molecular Spectroscopy; Surface Analysis)

To find similar documents by classification:

71.040.50 (Physicochemical methods of analysis Including spectrophotometric and chromatographic analysis)

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