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Scope

1.1 This standard consists of terms and definitions pertaining to measurements taken on thin, reflecting films, such as found in microelectromechanical systems (MEMS) materials. In particular, the terms are related to the standards in Section , which were generated by Committee E08 on Fatigue and Fracture. Terminology E 1823 Relating to Fatigue and Fracture Testing is applicable to this standard.

1.2 The terms are listed in alphabetical order.

Keywords

ICS Number Code 01.040.31 (Electronics (Vocabularies)); 31.240 (Mechanical structures for electronic equipment)

To find similar documents by ASTM Volume:

03.01 (Metals -- Mechanical Testing; Elevated and Low-Temperature Tests; Metallography)

To find similar documents by classification:

01.040.31 (Electronics (Vocabularies))

31.240 (Mechanical structures for electronic equipment)

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