ASTM-E2530 › Standard Practice for Calibrating the Z-Magnification of an Atomic Force Microscope at Subnanometer Displacement Levels Using Si(111) Monatomic Steps (Withdrawn 2015)
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Scope
1.1 This practice covers a measurement procedure to calibrate the z-scale of an atomic force microscope using Si(111) monatomic step height specimens.
1.2 Applications This procedure is applicable either in ambient or vacuum condition when the atomic force microscope (AFM) is operated at its highest levels of z-magnification, that is, in the nanometer and sub-nanometer ranges of z-displacement. These ranges of measurement are required when the AFM is used to measure the surfaces of semiconductors, optical surfaces, and other high technology components.
1.3 The values stated in SI units are to be regarded as the standard. The values given in parentheses are for information only.
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
Significance and Use
Careful use of this practice can yield calibrated z-magnifications traceable to the SI unit of length with uncertainties (k = 2) of approximately 7 % over height ranges of approximately 1 nm.
Keywords
atomic force microscope; atomic steps; AFM; calibration; measurement; silicon; z-magnification; ICS Number Code 19.020 (Test conditions and procedures in general); 71.040.50 (Physicochemical methods of analysis)
To find similar documents by ASTM Volume:
03.06 (Molecular Spectroscopy; Surface Analysis)
To find similar documents by classification:
19.020 (Test conditions and procedures in general)
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Document Number
ASTM-E2530-06
Revision Level
2006 EDITION
Status
Cancelled
Modification Type
Withdrawn
Publication Date
Nov. 1, 2006
Document Type
Practice
Page Count
6 pages
Committee Number
E42.14