ASTM-E827 › Historical Revision Information
Standard Practice for Indentifying Elements by the Peaks in Auger Electron Spectroscopy
The following bibliographic material is provided to assist you with your purchasing decision:
Scope
1.1 This practice outlines the necessary steps for the identification of elements in a given Auger spectrum obtained using conventional electron spectrometers. Spectra displayed as either the electron energy distribution (direct spectrum) or the first derivative of the electron energy distribution are considered.
1.2 This practice applies to Auger spectra generated by electron or X-ray bombardment of the specimen surface and can be extended to spectra generated by other methods such as ion bombardment.
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
Significance and Use
Auger analysis is used to determine the elemental composition of the first few atomic layers, typically 0.5 to 2.0 nm thick, of a specimen surface. In conjunction with inert gas ion sputtering, it is used to determine the sputter depth profile to a depth of a few micrometres.
The specimen is normally a solid conductor, semiconductor, or insulator. For insulators, provisions may be required for control of charge accumulation at the surface (see Guide E 1523
Auger analysis of specimens with volatile species that evaporate in the ultra-high vacuum environment of the Auger chamber and substances which are susceptible to electron or X-ray beam damage, such as organic compounds, may require special techniques not covered herein. (See Guide E 983
Keywords
Auger electron spectroscopy; AES; spectroscopy; ICS Number Code 71.040.50 (Physicochemical methods of analysis)
To find similar documents by ASTM Volume:
03.06 (Molecular Spectroscopy; Surface Analysis)
To find similar documents by classification:
This document comes with our free Notification Service, good for the life of the document.
This document is available in either Paper or PDF format.
Document Number
ASTM-E827-02
Revision Level
2002 EDITION
Status
Superseded
Publication Date
April 10, 2002
Document Type
Practice
Page Count
3 pages
Committee Number
E42.03