ASTM-F1367 › Complete Document History
Standard Specification for Chromium Sputtering Targets for Thin Film Applications
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1998 R11 EDITION - REAPPROVED IN 2011 - July 1, 2011
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Obsolete Revision Information: |
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1998 R03 EDITION - REAPPROVED IN 2003 - Dec. 1, 2003
1998 EDITION - CHROMIUM SPUTTERING TARGETS FO - Aug. 10, 1998 1992 EDITION - CHROMIUM SPUTTERING TARGETS FO - Jan. 15, 1992 |