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Scope

1.1 This specification covers sputtering targets fabricated from chromium metal.

1.2 This specification sets purity grade levels, physical attributes, analytical methods and packaging requirements.

1.3 The values stated in SI units are regarded as standard.

Keywords

Chromium; Chromium sputtering targets; Sputtering; Targets; chromium sputtering targets for thin film applications, test; ICS Number Code 25.220.40 (Metallic coatings)

To find similar documents by ASTM Volume:

10.04 (Electronics; Declarable Substances in Materials; 3D Imaging Systems)

To find similar documents by classification:

25.220.40 (Metallic coatings Including electrolytic depositions, cathodic coatings, autocatalytic coatings, etc.)

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