ASTM-F1709 › Historical Revision Information
Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film Applications

ASTM-F1709 - 1997 EDITION - SUPERSEDED
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Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film Applications (Withdrawn 2023)
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Scope

1.1 This specification covers pure titanium sputtering targets used as a raw material in fabricating semiconductor electronic devices.

1.2 This standard sets purity grade levels, physical attributes, analytical methods, and packaging.

Keywords

ICS Number Code 31.120 (Electronic display devices)

To find similar documents by ASTM Volume:

10.04 (Electronics; Declarable Substances in Materials; 3D Imaging Systems)

To find similar documents by classification:

31.120 (Electronic display devices Including liquid crystal displays)

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Document Number

ASTM-F1709-97

Revision Level

1997 EDITION

Status

Superseded

Modification Type

Revision

Publication Date

Jan. 1, 1997

Document Type

Specification

Page Count

3 pages

Committee Number

F01.17