ASTM-F2113 › Complete Document History
Standard Guide for Analysis and Reporting the Impurity Content and Grade of High Purity Metallic Sputtering Targets for Electronic Thin Film Applications
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2001 R11 EDITION - REAPPROVED IN 2011 - July 1, 2011
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Obsolete Revision Information: |
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2001 R07 EDITION - REAPPROVED IN 2007 - July 1, 2007
2001(E1) EDITION - GRADE 3N5 WAS ADDED TO TABLE 1 - Oct. 1, 2001 2001 EDITION - TARGETS FOR ELECTRONIC THIN FI - June 10, 2001 |