BS-ISO-16413 › Complete Document History
Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting

Complete Current Edition:
   2020 EDITION - Alignment and positioning, data collection, data analysis and reporting - Aug. 18, 2020

Obsolete Revision Information:
   2013 EDITION - Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting - March 31, 2013