BS-ISO-16413 › Historical Revision Information
Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting
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Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting
Keywords
X-ray apparatus;X-ray analysis;Instruments;Density measurement;X-rays;Thickness measurement
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Document Number
BS ISO 16413:2013
Revision Level
2013 EDITION
Status
Superseded
Publication Date
March 31, 2013
Replaced By
BS ISO 16413:2020
Page Count
42
ISBN
9780580730160
International Equivalent
ISO 16413:2013
Committee Number
CII/60