BS-ISO-21466 › Microbeam analysis. Scanning electron microscopy. Method for evaluating critical dimensions by CDSEM
BS-ISO-21466
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2019 EDITION
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CURRENT
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Microbeam analysis. Scanning electron microscopy. Method for evaluating critical dimensions by CDSEM
Keywords
Scanning electron microscopes;Electron microscopes;Dimensions;Evaluation;Electrons;Analysis
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Document Number
BS ISO 21466:2019
Revision Level
2019 EDITION
Status
Current
Publication Date
Dec. 18, 2019
Page Count
56
ISBN
9780580948404
International Equivalent
ISO 21466
Committee Number
CII/9