EN-62047-21 › Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials

EN-62047-21 - 2014 EDITION - CURRENT -- See the following: BS-EN-62047-21 DIN-EN-62047-21



Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials


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Document Number

EN 62047-21:2014

Revision Level

2014 EDITION

Status

Current

Publication Date

Sept. 26, 2014