IEC-62047-1 › Complete Document History
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
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EDITION 2.0 - Part 1: Terms and definitions - Jan. 1, 2016
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Obsolete Revision Information: |
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1ST EDITION - PART 1: TERMS & DEFINITIONS, SEMICONDUCTOR DEVICES - MICRO-E - Sept. 1, 2005
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