IEC-62047-1 › Historical Revision Information
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
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This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices.
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31.080.99 (Other semiconductor devices)
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Document Number
IEC 62047-1 Ed. 1.0 b:2005
Revision Level
1ST EDITION
Status
Superseded
Publication Date
Sept. 1, 2005
Committee Number
47