ISO-21360-6 › Vacuum technology - Standard methods for measuring vacuum-pump performance - Part 6: Cryogenic vacuum pumps

ISO-21360-6 - 1ST EDITION - CURRENT


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This document specifies methods for measuring the volume flow rate, maximum throughput, pumping capacity, base pressure cryogenic vacuum pump, cooldown time and crossover value of cryogenic vacuum pumps.

It is applicable to two-stage, closed-loop gaseous helium cryogenic vacuum pumps, which can be directly flanged to a vacuum chamber.

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Document Number

ISO 21360-6:2023

Revision Level

1ST EDITION

Status

Current

Publication Date

Dec. 1, 2023

Committee Number

ISO/TC 112