SEMI-E1.5 › Complete Document History
Standard for 150 mm Plastic & Metal Wafer Carriers, Generalusage
Obsolete Revision Information: |
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1991 R99 EDITION - REAPPROVED IN 1999 - Feb. 1, 1999
1991 EDITION - STANDARD FOR 150 MM PLASTIC & - Jan. 1, 1991 |