SEMI-E1.5 › Historical Revision Information
Standard for 150 mm Plastic and Metal Wafer Carriers, Generalusage

SEMI-E1.5 - 1991 R99 EDITION - SUPERSEDED
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Standard for 150 mm Plastic & Metal Wafer Carriers, Generalusage


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Document Number

SEMI-E1.5

Revision Level

1991 R99 EDITION

Status

Superseded

Publication Date

Feb. 1, 1999

Page Count

2 pages