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Scope

1.1 This guide provides the SIMS analyst with a method for determining the width of interfaces from SIMS sputtering data obtained from analyses of layered specimens. This guide does not apply to data obtained from analyses of specimens with thin markers or specimens without interfaces such as ion-implanted specimens.

1.2 This guide does not describe methods for the optimization of interface width or the optimization of depth resolution.

1.3 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Keywords

data analysis-spectrochemical; depth resolution; interface width; profile distortion; secondary ion mass spectrometry (SIMS)

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03.06 (Molecular Spectroscopy; Surface Analysis)

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29.045 (Semiconducting materials)

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