ASTM-E673 › Historical Revision Information
Standard Terminology Relating to Surface Analysis
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Scope
1.1 This terminology is related to the various disciplines involved in surface analysis.
1.2 The definitions listed apply to (a) Auger electron spectroscopy (AES), (b) X-ray photoelectron spectroscopy (XPS), (c) ion-scattering spectroscopy (ISS), (d) secondary ion mass spectrometry (SIMS), and (e) energetic ion analysis (EIA).
Keywords
terminology; ICS Number Code 01.040.17 (Metrology and measurement. Physical phenomena (Vocabularies)); 17.040.20 (Properties of surfaces)
To find similar documents by ASTM Volume:
03.06 (Molecular Spectroscopy; Surface Analysis)
To find similar documents by classification:
01.040.17 (Metrology and measurement. Physical phenomena (Vocabularies))
17.040.20 (Properties of surfaces)
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Document Number
ASTM-E673-95
Revision Level
1995 EDITION
Status
Superseded
Modification Type
Editorially changed
Publication Date
Jan. 15, 1995
Document Type
Terminology
Page Count
10 pages
Committee Number
E42.02