ASTM-E673 › Historical Revision Information
Standard Terminology Relating to Surface Analysis
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Standard Terminology Relating to Surface Analysis (Withdrawn 2012)
Scope
1.1 This terminology is related to the various disciplines involved in surface analysis.
1.2 The definitions listed apply to (a) Auger electron spectroscopy (AES), (b) X-ray photoelectron spectroscopy (XPS), (c) ion-scattering spectroscopy (ISS), (d) secondary ion mass spectrometry (SIMS), and (e) energetic ion analysis (EIA).
Keywords
terminology; surface analysis
To find similar documents by ASTM Volume:
03.06 (Molecular Spectroscopy; Surface Analysis)
To find similar documents by classification:
01.040.17 (Metrology and measurement. Physical phenomena (Vocabularies))
17.040.20 (Properties of surfaces)
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Document Number
ASTM-E673-02b
Revision Level
2002B EDITION
Status
Superseded
Modification Type
Revision
Publication Date
Dec. 10, 2002
Document Type
Terminology
Page Count
10 pages
Committee Number
E42.02