ASTM-F1153 › Historical Revision Information
Standard Test Method for Characterization of Metal-Oxide-Silicon (MOS) Structures by Capacitance-Voltage Measurements
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Scope
1.1 This test method covers procedures for measurement of metal-oxide-silicon (MOS) structures for flatband capacitance, flatband voltage, average carrier concentration within a depletion length of the semiconductor-oxide interface, displacement of flatband voltage after application of voltage stress at elevated temperatures, mobile ionic charge contamination, and total fixed charge density. Also covered is a procedure for detecting the presence of P-N junctions in the subsurface region of bulk or epitaxial silicon.
1.2 The procedure is applicable to -type and -type bulk silicon with carrier concentration from 5
1.3 The procedure is applicable for test specimens with oxide thicknesses of 50 to 300 nm.
1.4 The procedure can give an indication of the level of defects within the MOS structure. These defects include interface trapped charge, fixed oxide charge, trapped oxide charge, and permanent inversion layers.
1.5 The precision of the procedure can be affected by inhomogeneities in the oxide or in the semiconductor parallel to the semiconductor-oxide interface.
1.6 The procedure is applicable for measurement of mobile ionic charge concentrations of 1
1.7 The procedure is applicable for measurement of total fixed charge density of 5
1.8 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
Keywords
Average carrier concentration; Calibration-semiconductor instrumentation; Capacitance; Contamination-semiconductors; Defects-semiconductors; Dielectric constant (permittivity)/dissipation factor; Doping concentration; Electrical conductors-semiconductors; Electromagnetic interference; Equilibrium capacitance; Fixed oxide charge; Flatband capacitance/voltage; Interfacial tension; Inversion; Meal-oxide-silicon (MOS) structures; Minimum depletion layer capacitance; Mobile ionic charge contamination; Net carrier concentration; Oxide metallization thickness; Permanent inversion layers; Photosensitivity; Resistance and resistivity (electrical)-semiconductors; Silicon-semiconductor applications; Stress-electronic components/devices; Total fixed charge density; Trapped oxide charge; Voltage; metal-oxide-silicon (MOS) structures-characterization, by; capacitance-voltage measurements, test
To find similar documents by ASTM Volume:
10.04 (Electronics; Declarable Substances in Materials; 3D Imaging Systems)
To find similar documents by classification:
31.060.01 (Capacitors in general)
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Document Number
ASTM-F1153-92(1997)
Revision Level
1992 R97 EDITION
Status
Superseded
Modification Type
Reapproval
Publication Date
May 15, 1992
Document Type
Test Method
Page Count
7 pages
Committee Number
F01.06